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Figure 1. The Refractor™ Reactor.
The Refractor™ Reactor is a reaction chamber for in-line grazing incidence studies. It is ideal for recording spectra of thin films on metal substrates. The angle of incidence is fixed at 75° and can accommodate samples up to 0.125" thick by 1.7" x 1". It can be heated up to 500°C under vacuum, evacuated to 13 mPa (10-4 torr), and pressurized up to 203 kPa (2 ATM) with the standard ZnSe windows. Excellent spectral contrast results.
Conventional in-line grazing incidence attachments have a significant drawback. The short plane mirrors employed do not totally intercept the beam of the spectrometer, resulting in a significant loss in optical throughput. In the Refractor, these losses do not occur, since the optical beam is deflected (15°) to and from the sample via wedged (10°) ZnSe windows.
The Refractor™ Reactor has two ports for flowing reactant over the sample, evacuating the sample, and pressurizing the sample with a reactant. Heating cartridges are imbedded below the sample and two thermocouples are supplied to measure the sample and heater temperatures. For precise temperature control, the heater and thermocouples should be connected to a Temperature Controller.
Figure 2. External Reflectance of SiO₂ on Aluminum.
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Figure 3. Grazing Angle Spectrum of Silicon Lubricant on Aluminum.
Figure 2 shows the spectrum of a silicon dioxide film, approximately 500 Å thick, on an aluminum substrate. In Figure 3, the spectrum of a 100 Å layer of silicone lubricant on an aluminum substrate is given. Here, an external wire-grid polarizer is used to generate P-polarized incident radiation.
The Refractor™ is supplied with all mounting hardware required to install it directly in the spectrometer and is compatible with most center focus FTIR instruments. Alignment is fast and simple. For measurements that require spectral information at frequencies below 500cm-1, replacement KRS-5 windows are available on special order.
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